Dr. Frank Z. Feng (Project 2)

Low cost MEMS microfluidic channels

Microfluidic channels are vital in MEMS cell sensors. They serve to automatically transport cells to intended targets without labor intensive manual control by piezoelectric manipulators. Development of  microfluidic channels using conventional MEMS techniques is very expensive; for instance, each mask can cost over $5000. Since the microfluidic channels for cell transport have minimum channel width on the order of 50 microns, it is possible to use less expensive masks for the lithography.

In addition to using low cost masks, tremendous savings can be achieved using rapid prototyping of molds for polymer molding of the microchannels.

Objectives:

• High resolution (5080 dpi, or 5um per dot) masks on transparencies from University of Missouri Printing Services ($10 per mask)
• Negative photoresist (SU 8) as stamper (in-house spin coating, UV exposure, developing)
• Microfluidic channel formed by PDMS and the stamper
• Glass cover to form enclosed channels

Applications:

• Biomedical industry

Funding Agency:

• National Science Foundation

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